Simplicity 1730319 User Manual

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AGILENT
DIFFUSION PUMPS
2-3 Features and Benefits
4-5 Typical Applications
6-29 Pump Models
30 Fluids
31 Baffles
32-35 Technical Notes
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1 2 3 4 5 6 ... 34 35

Summary of Contents

Page 1 - DIFFUSION PUMPS

AGILENT DIFFUSION PUMPS2-3 Features and Benefits4-5 Typical Applications6-29 Pump Models30 Fluids31 Baffles32-35 Technical Notes

Page 2

106(152.4)4.78(121.4)12.69(322).84(21.3)DIA O.D.Dimensions: inches (millimeters)Technical SpecificationsPumping speed, operating range 160 l/s air, 2

Page 3

11Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-150100150200 1.61.20.80.40Throughput (Torr-l/se

Page 4 - TYPICAL APPLICATIONS

12PUMP MODELSTechnical SpecificationsPumping speed*, operating range 750 l/s air, 940 l/s He/H2Pumping speed*, AVS 4.1 (1963) 1,200 l/s airMaximum t

Page 5

13Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-12006008001000 54310Throughput (Torr-l/sec)2400

Page 6 - PUMP SPECIFICATIONS

14PUMP MODELSTechnical SpecificationsPumping speed, operating range 1,550 l/s air, 1,930 l/s He/H2Pumping speed*, AVS 4.1 (1963) 2,400 l/s airMaximu

Page 7

15Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-1400120016002000 54310Throughput (Torr-l/sec)28

Page 8 - Agilent AX-65

16PUMP MODELSTechnical SpecificationsPumping speed, operating range 2,125 l/s air, 2,660 l/s He/H2Pumping speed*, AVS 4.1 (1963) 3,700 l/s airMaximu

Page 9

17Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part NumberVHS-250 pumpVHS-250 with standard cold cap 120

Page 10 - Agilent HS-2

18PUMP MODELSTechnical SpecificationsPumping speed, operating range 3,650 l/s air, 4,560 l/s He/H2Pumping speed*, AVS 4.1 (1963) 5,300 l/s airMaximu

Page 11

19Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-1100030004000 12930Throughput (Torr-l/sec)62000

Page 12 - Agilent VHS-4

2DIFFUSION PUMPS FEATURES AND BENEFITSAgilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer

Page 13

20PUMP MODELSTechnical SpecificationsPumping speed, operating range 4,500 l/s air, 5,625 l/s He/H2Pumping speed*, AVS 4.1 (1963) 8,000 l/s airMaximu

Page 14 - Agilent VHS-6

21Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)50010-710-610-510-410-310-2150020003000400045005000 1086420Throughput (Tor

Page 15

22PUMP MODELSTechnical SpecificationsPumping speed, operating range 6,000 l/s air, 7,500 l/s He and H2Pumping speed*, AVS 4.1 (1963) 10,000 l/s airM

Page 16 - Agilent VHS-250

23Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type HS-16 Pump ASA ISOHS-16 wit

Page 17

24PUMP MODELSTechnical SpecificationsPumping speed, operating range 10,000 l/s air, 12,500 l/s He and H2Pumping speed*, AVS 4.1 (1963) 17,500 l/s ai

Page 18 - Agilent VHS-10

25Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type HS-20 Pump ASA ISOHS-20 wit

Page 19

26PUMP MODELS26.50(673)46.75(1187)68.50(1740)Technical SpecificationsPumping speed, operating range 17,300 l/s air, 21,625 l/s He and H2Pumping speed

Page 20 - Agilent VHS-400

27Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)200010-710-610-510-410-310-210-1400060008000100001200014000160001800020000

Page 21

2842.25(1073)31.81(808)72.13(1832)Inlet pressure (Torr)010-8Air speed (l/sec)500010-710-610-510-410-310-210-1100001500020000250003000035000 7060504030

Page 22 - Agilent HS-16

29Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type NHS-35 Pump ASA ISONHS-35 w

Page 23

3DIFFUSION PUMPSDiffusion PumpsBuilt for Production VolumesOur success is in helping you meet the exacting requirements of your production process. O

Page 24 - Agilent HS-20

30FLUIDSOrdering InformationDescription Diffusion Pump Weight kg (lbs) Part Number Exact ChargeNEOVAC SY1 liter/1,000 cc VHS-10, VHS-400 3.0 (1.

Page 25

31Diffusion PumpsDIFFUSION PUMPSBAFFLESTechnical SpecificationsSpeed with Extended Cold Cap ≈ 80% of pump speedMaterials Nickel-plated copperCoolin

Page 26 - Agilent HS-32

32TECHNICAL NOTESDiffusion pumps were first conceived and constructed by W. Gaede (1915-Germany) and I. Langmuir (1916-U.S.A). They operate on the pri

Page 27

33Diffusion PumpsDIFFUSION PUMPSThis means that before the pump is started, it must be “rough pumped” down to and held at an acceptable pressure, typ

Page 28 - Agilent NHS-35

34TECHNICAL NOTESFor additional oxidation resistance, many applications lend themselves to the use of silicone fluids. These are phenyl siloxane compo

Page 29

35Diffusion PumpsDIFFUSION PUMPSperiod is considered. All backstreaming tests were perfomed using DC-704 pumping fluid (no longer available).The meas

Page 30 - Ordering Information

4TYPICAL APPLICATIONSAs the worldwide diffusion pump market leader, Agilent produces the most comprehensive family of pumps, ranging from 2 in. to 35

Page 31 - DIFFUSION PUMPSBAFFLES

5Diffusion PumpsDIFFUSION PUMPSVacuum FurnacesVacuum furnace applications require pumps that are capable of achieving stable pressures in high gas fl

Page 32 - TECHNICAL NOTES

6PUMP SPECIFICATIONSAX-65 HS-2 VHS-4 VHS-6 VHS-250 VHS-10 VHS-400 HS-16 HS-20 HS-32 NHS-35Previous model number 0160 0183 0184 0178 0185 0182 0164 01

Page 33

7Diffusion PumpsDIFFUSION PUMPSAX-65 HS-2 VHS-4 VHS-6 VHS-250 VHS-10 VHS-400 HS-16 HS-20 HS-32 NHS-35Previous model number 0160 0183 0184 0178 0185

Page 34

8PUMP MODELSTechnical SpecificationsPumping speed*, operating range 65 l/sec air, 90 l/s He and H2Maximum throughput 0.19T-l/s (0.25 mbar-l/s) in

Page 35

9Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)1010-710-610-510-410-310-210-1305070900.750.600.450.300.150Throughput (Torr

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