AGILENT DIFFUSION PUMPS2-3 Features and Benefits4-5 Typical Applications6-29 Pump Models30 Fluids31 Baffles32-35 Technical Notes
106(152.4)4.78(121.4)12.69(322).84(21.3)DIA O.D.Dimensions: inches (millimeters)Technical SpecificationsPumping speed, operating range 160 l/s air, 2
11Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-150100150200 1.61.20.80.40Throughput (Torr-l/se
12PUMP MODELSTechnical SpecificationsPumping speed*, operating range 750 l/s air, 940 l/s He/H2Pumping speed*, AVS 4.1 (1963) 1,200 l/s airMaximum t
13Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-12006008001000 54310Throughput (Torr-l/sec)2400
14PUMP MODELSTechnical SpecificationsPumping speed, operating range 1,550 l/s air, 1,930 l/s He/H2Pumping speed*, AVS 4.1 (1963) 2,400 l/s airMaximu
15Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-1400120016002000 54310Throughput (Torr-l/sec)28
16PUMP MODELSTechnical SpecificationsPumping speed, operating range 2,125 l/s air, 2,660 l/s He/H2Pumping speed*, AVS 4.1 (1963) 3,700 l/s airMaximu
17Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part NumberVHS-250 pumpVHS-250 with standard cold cap 120
18PUMP MODELSTechnical SpecificationsPumping speed, operating range 3,650 l/s air, 4,560 l/s He/H2Pumping speed*, AVS 4.1 (1963) 5,300 l/s airMaximu
19Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)10-710-610-510-410-310-210-1100030004000 12930Throughput (Torr-l/sec)62000
2DIFFUSION PUMPS FEATURES AND BENEFITSAgilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer
20PUMP MODELSTechnical SpecificationsPumping speed, operating range 4,500 l/s air, 5,625 l/s He/H2Pumping speed*, AVS 4.1 (1963) 8,000 l/s airMaximu
21Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)50010-710-610-510-410-310-2150020003000400045005000 1086420Throughput (Tor
22PUMP MODELSTechnical SpecificationsPumping speed, operating range 6,000 l/s air, 7,500 l/s He and H2Pumping speed*, AVS 4.1 (1963) 10,000 l/s airM
23Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type HS-16 Pump ASA ISOHS-16 wit
24PUMP MODELSTechnical SpecificationsPumping speed, operating range 10,000 l/s air, 12,500 l/s He and H2Pumping speed*, AVS 4.1 (1963) 17,500 l/s ai
25Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type HS-20 Pump ASA ISOHS-20 wit
26PUMP MODELS26.50(673)46.75(1187)68.50(1740)Technical SpecificationsPumping speed, operating range 17,300 l/s air, 21,625 l/s He and H2Pumping speed
27Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)200010-710-610-510-410-310-210-1400060008000100001200014000160001800020000
2842.25(1073)31.81(808)72.13(1832)Inlet pressure (Torr)010-8Air speed (l/sec)500010-710-610-510-410-310-210-1100001500020000250003000035000 7060504030
29Diffusion PumpsDIFFUSION PUMPSOrdering InformationDescription Voltage Weight kg (lbs) Part Number Flange Type NHS-35 Pump ASA ISONHS-35 w
3DIFFUSION PUMPSDiffusion PumpsBuilt for Production VolumesOur success is in helping you meet the exacting requirements of your production process. O
30FLUIDSOrdering InformationDescription Diffusion Pump Weight kg (lbs) Part Number Exact ChargeNEOVAC SY1 liter/1,000 cc VHS-10, VHS-400 3.0 (1.
31Diffusion PumpsDIFFUSION PUMPSBAFFLESTechnical SpecificationsSpeed with Extended Cold Cap ≈ 80% of pump speedMaterials Nickel-plated copperCoolin
32TECHNICAL NOTESDiffusion pumps were first conceived and constructed by W. Gaede (1915-Germany) and I. Langmuir (1916-U.S.A). They operate on the pri
33Diffusion PumpsDIFFUSION PUMPSThis means that before the pump is started, it must be “rough pumped” down to and held at an acceptable pressure, typ
34TECHNICAL NOTESFor additional oxidation resistance, many applications lend themselves to the use of silicone fluids. These are phenyl siloxane compo
35Diffusion PumpsDIFFUSION PUMPSperiod is considered. All backstreaming tests were perfomed using DC-704 pumping fluid (no longer available).The meas
4TYPICAL APPLICATIONSAs the worldwide diffusion pump market leader, Agilent produces the most comprehensive family of pumps, ranging from 2 in. to 35
5Diffusion PumpsDIFFUSION PUMPSVacuum FurnacesVacuum furnace applications require pumps that are capable of achieving stable pressures in high gas fl
6PUMP SPECIFICATIONSAX-65 HS-2 VHS-4 VHS-6 VHS-250 VHS-10 VHS-400 HS-16 HS-20 HS-32 NHS-35Previous model number 0160 0183 0184 0178 0185 0182 0164 01
7Diffusion PumpsDIFFUSION PUMPSAX-65 HS-2 VHS-4 VHS-6 VHS-250 VHS-10 VHS-400 HS-16 HS-20 HS-32 NHS-35Previous model number 0160 0183 0184 0178 0185
8PUMP MODELSTechnical SpecificationsPumping speed*, operating range 65 l/sec air, 90 l/s He and H2Maximum throughput 0.19T-l/s (0.25 mbar-l/s) in
9Diffusion PumpsDIFFUSION PUMPSInlet pressure (Torr)010-8Air speed (l/sec)1010-710-610-510-410-310-210-1305070900.750.600.450.300.150Throughput (Torr
Comments to this Manuals